完整版波前像差原理及应用.ppt

波前像差项 对应于传统几何光学的描述 Z1 x-axis tilt X 轴偏移 Z2 y-axis tilt Y 轴偏移 Z3 astigmatism in 0 or 90 degree 0 °或 90 °方向散光 Z4 defocus 离焦 Z5 astigmatism In 45 degree 45 °方向散光 Z7 x-axis coma X 轴彗差 Z8 y-axis coma Y 轴彗差 Z12 spherical aberration 球差 -3 -2 -1 0 1 2 3 -3 -2 -1 0 1 2 3 Wavefront Aberration mm (right-left) m m ( s u p e r i o r - i n f e r i o r ) 像差的表示方法 3 Dimensional View 2 Dimensional View Zernike Modes trefoil coma coma trefoil quadrafoil secondary spherical 2nd 3rd 4th 5th secondary quadrafoil pentafoil secondary secondary secondary pentafoil secondary defocus astigmatism astigmatism astigmatis