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摘?要?
伴随科学技术不停发展，自动化智能化一步一步走入大家生活中每一个角落。然而自动化和智能化实现无疑离不开传感器。传感器这个大家族之中，电容式传感器又占有举足轻重位置。电容器传感器优点是结构简单,价格廉价，灵敏度高，零磁滞，真空兼容，过载能力强，动态响应特征好和对高温、辐射、强振等恶劣条件适应性强等。缺点是输出有非线性，寄生电容和分布电容对灵敏度和测量精度影响较大，和联接电路较复杂等。本课程设计设计了一个基于MEMS电容式测量加速度传感器。
?基于微机电系统( MEMS)技术微机械加速度传感器含有体积小、质量轻、开启快、功耗低、易集成、可靠性好、抗过载能力强和成本低廉等很多优点，在航空航天、汽车技术机器人技术、工业自动化、掌上电子产品等很多领域得到了广泛应用。依据其敏感信号方法，能够分为微型电容式速度传感器、微型压阻式加速度传感器、微型压电式加速度、感器和微型隧道电流式加速度传感器等。
关键词：电容 加速度 传感器 信号放大 微电子机械系统
目录
第一章 绪论···············································3
1.1?课题研究相关背景······························3
1.2?选题目标和意义?·······························4
1.3?课题研究内容··································5
1.4?中国外研究现实状况··································5
1.5?传感器现在存在关键问题························5
第二章 结构设计··········································6
2.1 微机械电容式加速度计结构设计标准·············6
2.2 微机械电容式加速度计三种常见结构·············6
2.3 电容式加速度传感器设计方法选择和优化···········7
2.4 电容加速度传感器结构梁设计···················10
2.5微机械电容式加速度传感器设计参数··············14
2.6传感器工作原理及数据计算························16
2.7微机械加工工艺·································17
第三章 测控电路·········································18
3.1转换电路·······································18
3.2正弦波产生电路·································19
3.3 仪用放大器······································20
3.4相敏检波电路····································21
3.5滤波电路········································22
第四章 技术指标··········································23
4.1壳体固定要求····································23
4.2滑块和壳体接触面光滑度要求····················23
4.3测控电路要求··································23
第五章传感器适用范围·····································23
5.1影响适用范围原因······························23
5.2加设重力加速度传感器?····························23
第六章 总结和展望········································24
6.1数据关系········································24
6.2和书本上面测加速度传感器对比··················24?
第七章 总结和展望········································24
7.1总结············································24
7.2展望············································24
参考文件····································
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