download - byu physics and astronomy：-杨百翰大学物理与天文学-文档.pptVIP

Definition of Terms;Research Goals;Motivation – Study of Oxidation;Thesis Description;UHV Vacuum (?10-9 torr);Conflat flange- Copper seal;Vacuum Pumps;Overview of Components; ;Overview of Components (cont.);Sputter Gun Mechanism in Vacuum Chamber;Overview of Components (cont.);Overview of Components (cont.);Overview of Components (cont.);Ruthenium Thin Film;Current Status;Comments on Length of Thesis;Credits and Thanks;谢谢您的欣赏