ZYGO干涉仪2精品管理文档.pptVIP

Zeeko Stitching Interferometry; Why use stitching interferometry Extend the aperture of an interferometer – measure larger diameter parts Enable measurements on high-NA convex parts Can be used to extend the aspheric measuring range of an interferometer Can be used to give increased spatial resolution Can shorten the optical length of the interferometer cavity to reduce the effects of turbulence;Measuring Instruments;Recipe for Stitching;An example using a convex surface under test;We have a sub-aperture map on the surface to test;We then have a series of sub-apertures after the measurement;