ic工艺几种ic工艺流程.pptxVIP

IC工艺几种IC工艺流程会计学After studying the material in this chapter, you will be able to:Draw a diagram showing how a typical wafer flows in a sub-micron CMOS IC fab. 画出典型的流程图Give an overview of the six major process areas and the sort/test area in the wafer fab. 对6种主要工艺的应用和测试有大概的认识For each of the 14 CMOS manufacturing steps, describe its primary purpose. 描述CMOS工艺14个步骤的主要目的Discuss the key process and equipment used in each CMOS manufacturing step. 能讨论每一步流程的关键工艺和设备 UV lightMaskoxygenexposedphotoresistphotoresistSilicon dioxideoxideSilicon substrateExposed PhotoresistPhotoresistDevelopOxidation(Field oxi