磁控溅射法制备Ag纳米阵列研究.pdfVIP

Applied Physics 应用物理, 2011, 1, 92-96 doi:10.4236/app.2011.13015 Published Online October 2011 (/journal/app/) Preparation of Ag Nano-Array by Magnetron Sputtering Technique Xiaofang Zhou Department of Electronic Information and Physics, Changzhi College, Changzhi Email: xfzhou7259@163.com Received: Jul. 18th, 2011; revised: Aug. 20th, 2011; accepted: Aug. 27th, 2011. Abstract: Ag nano-arrays have been successfully prepared by magnetron sputtering on/in anodic aluminum oxide (AAO) template. These nano-arrays have order rule and uniform diameter of approximate 100 nm, closely resemble those of AAO. The micrographs and composition of Ag nano-arrays are studied by Atomic Force Microscope (AFM) and Energy Dispersive X-Ray Fluorescence Spectrometer (EDX). The growth mechanism of Ag nano-arrays has been discussed according to the AFM images. The AFM, as well as EDX results clearly indicated that, by the aid of AAO template, metal quantum dots and nanowire arrays can be grown by the magnetron sputtering technique. This method of combining with AAO template broadened the application of the nano-array materials, and provided the possibility of commercial manufacture of silver nano-array. Keywords: AAO Template; Magnetron Sputtering; Ag Nano-Array 磁控溅射法制备的 Ag 纳米阵列研究 周小芳 长治学院电子信息与物理系，长治 Email: xfzhou7259@163.com 收稿日期：2011 年 7 月 18 日；修回日期：2011 年 8 月 20 日；录用日期：2011 年 8 月 27 日 摘 要：本文采用两步阳极氧化法得到了尺寸均匀，排列规则的多孔阳极氧化铝(AAO) ，以AAO 模板 为掩膜，利用磁控溅射技术，在 AAO 模板上成功制备了线状 Ag 纳米阵列，AFM 及 EDX 分析表明，