低温等离子体表面处理技术.pdf

低温等离子体表面处 理技术 Plasma and first wall Introduction Today I will talk about something about my study on the first wall in the tokamak. Firstly, I will show you that what the plasma is in our life thought the following pictures such as: Fig.1 Lighning Fig.2 Aurora Fig.3 Astrospace Just as the pictures mentioned above , they are all consist of plasma. But, what does have in the plasma, now our scientist had given a definition that the plasma state is often referred to as thefourth state of matter and contains enough free charged particles （negative ions 、positive ions） and electronics. Like the photo below. Fig.4 Plasma production Plasma production In our research, we produce the plasma through an ICP (inductively coupled plasma) device as follow： Through the RF (radio frequency) source、power generator and matching box, we will get the plasma we need in the experiment. The Fig.6 shows us the plasma produced by the RF source. Fig.6 The ICP plasma Plasma diagnosis And then we need to diagnose the plasma characteristics through some methods like spectrum and probe. Fig.7 The plane probe We used the plane probe to detection the temperature of electronics and the density of the plasma as the Fig. 8 and Fig. 9. Fig.8 electronic temperature We can see among the power of 3000w-8000w, the change of electronic temperature is not sharp. And at the pressure of 0.258Pa, the electronic temperature is going up obviously. Fig.9 Plasma density In the Fig. 9 , we can confirm that as the rising of the power, the particle density is also more and more high. And before the pressure of 0.42Pa, the particles density is rising as the increase of the