半导体制造技术.pdfVIP

Introduction to Semiconductor Manufacturing Technology Chapter 1, Introduction Hong Xiao, Ph. D. hxiao89@ Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 1 Objective After taking this course, you will able to • Use common semiconductor terminology • Describe a basic IC fabrication sequence • Briefly explain each process step • Relate your job or products to semiconductor manufacturing process Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 2 Topics • Introduction • IC Device and Design • Semiconductor Manufacturing Processes • Future Trends Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 3 Introduction • First Transistor, ATT Bell Labs, 1947 • First Single Crystal Germanium, 1952 • First Single Crystal Silicon, 1954 • First IC device, TI, 1958 • First IC product, Fairchild Camera, 1961 Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 4 First Transistor, Bell Lab, 1947 Photo courtesy: ATT Archive Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 5 First Transistor and Its Inventors John Bardeen, William Shockley and Walter Brattain Photo courtesy: Lucent Technologies Inc. Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 6 First IC Device Made by Jack Kilby of Texas Instrument in 1958 Photo courtesy: Texas Instruments Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 7 First Silicon IC Chip Made by Robert Noyce of Fairchild Camera in 1961 Photo courtesy: Fairchild Semiconductor International Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm 8 Moore’s