EL LIV探針量測系統規格20210611(1).docxVIP

Specification / Order Confirmation Item Part No. Description Qty Unit Unit Price Amount 6 Probing LIV Measurement System, including 1 set 6 Probing set, including *Manual Prober with Microscope 1). 6 probe station main body 6 vacuum chuck with X-Y linear stage 6-6 fine adjustable; Z height 5mm fine adjustable 1 set eRails/Roller on the prober for chuck stag movement. One side for probing under microscope and the other side for measurement under integrating sphere e Supports with up/down mechanism holding /moving integrating sphere and microscope 5). Microscope with 3rd hole -a). Eyepiece