【半导体照明课件】8 第8章 AlGaInP 发光二极管.pptx

2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0第 8 章 AlGaInP 发光二极管 AlGaInP 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0Introduction to MOCVD/MOVPE/OMVPE 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0MOCVD/MOVPE/OMVPEMOCVD: Metal Organic Chemical Vapor DepositionMOVPE: Metal Organic Vapor Phase EpitaxyOMVPE: Organo Metallic Vapor Phase EpitaxyOften all three expressions are used interchangeably MOCVD实例三、LED外延片的制作二、LED外延片的制作 系统简介????????本系统为英国Thomas Swan公司制造，具有世界先进水平的商用金属有机源气相外延(MOCVD)材料生长系统，可用于制备GaAs和InP、GaN为代表的第二、三代半导体材料。在高亮度的蓝光发光二极管(LED)、激光器(LD)、日盲紫外光电探测器、高效率太阳能电池、高频大功率电子器件领域中具有广泛的应用。???三、LED外延片的制作二、LED外延片的制作 MOCVD已经成为工业界主要使用的镀膜技术。使用MOCVD这种镀膜技术制作LED的外延片，即在衬底上镀多层膜。外延片是LED生产的上游产业，在光电产业中扮演重要的角色。有些专家经常用一个国家或地区拥有MOCVD外延炉的数量来衡量这个国家或地区的光电行业的发展规模。三、LED外延片的制作二、LED外延片的制作 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0The World of Semiconductors III IV VCompound semiconductors III-Vs: GaAs, AlGaAs, GalnP, AlGaInP, GaN, InGaN… Speciality: SiCTraditional semiconductors Si: DRAMs, processorsAdvantages of compound semiconductors:? faster, higher frequencies? visible light, infrared? high efficient photovoltaics heat and high power resistantEnabling technology for: 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0How MOCVD Works 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0Components of a Low Pressure (LP) MOCVD Systemgas control unitreactor with heated susceptorvacuum systemcontrolunitscrubbing system 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0Simplified Presentation of a Crystal Growth Process 2021/2/13 SaturdayTSSEL part-1-MOVPE growth.ppt - version 1.0Basic Principle of the MOVPE ProcessA gas mixture containing the precursors needed for growth, and if necessary for doping, is passed over a heated substrate.The precursor molecules pyrolyze(使裂解) leaving the atoms, e.g., Ga and As atoms on the substrate surface.The atoms bond to the