NFPA 318-2022 半导体制造设备保护标准 Standard for the Protection of Semiconductor Fabrication Facilities.pdf

NFPA® 318 Standard for the Protection of Semiconductor Fabrication Facilities 2022 Edition 日 NFPA , 1 Batterymarch Park, Quincy, MA 02 169-7471 An International Codes and Standards Organization IMPORTANT NOTICES AND DISCLAIMERS CONCERNING NFPAqi STANDARDS NFPAll codes, standards, recommended practices, and guides (“NFPA Standards). ofwhich th e docun暗自l conta ined herein is one, are developed th1oug h a consensus standards developmen t process approved by the American National Standards Institute. This process brings together volunteers representing va1ied ＇~ewpoints and ime1 est to achieve consensus on fire and od1er safety issues. ＇川、ile the NFPA admi ni sters the proce拙and establishes 1ules to promote fairness in the development of conse·nsus, it does not indcpendemi) test, evaluate, or ve1 ify the accm ac) of an) in formation 01 d1e soundn ess of anyjudgrne n ts contain ed in NFPA St.andai ds. The NFPA disclaims liability for an y pe1百onal i 叼ury, propert~＇’， 01 or.her damages of any n awre whatsoe,•e 1-, whether special, indirect, consequential or compensatorγ， directly or iodireccJy resu lting fron the publication, use of, or reliai1ce on NFPA Standard. The NFPA a lso makes no guarnnty or wananty as to the accu1百cy or completeness of any information published herein. In isSLLin g and making NFPA Standards avai lable. the NFPA is 口ot underu仙lg to render profession对or other services for 01 on beha lf of any person or en dry. Nor is the NFPA u n dertaking ro perform an y duty owed by an y person or entiry ro someone else. Anyon e using cJtis document should re ly on his or h