二极管激光器快轴光束准直.docVIP

二极管激光器快轴光束准直

第卷第期年月红外与激光工程4011201111

Vol.40No.11InfraredandLaserEngineeringNov.2011

二极管激光器快轴光束准直

郭林辉，高松信，吕文强，武德勇，唐淳

(中国工程物理研究院应用电子学研究所，四川绵阳621900)

摘要:二极管激光器泵浦模块输出光束发散角小、指向精度高，但其中的快轴准(FA直C)微透镜装

调工艺不能满足大功率模块的应用要求，针对此问题，分析了快轴准直微透镜的光束准直原理，简述了应用FAC透镜时的参数选择和装调问题。通过光学成像方法实时监测二极管激光巴条(bar)的近场像和远场像，对FAC透镜分别进行粗调节和细调节，获得了20个巴条连续输出2kW垂直阵列二极

2管激光快轴准直光束远场发散角(1/e)4.4mrad、巴条间准直光束指向精度不大于?1.7mrad的准直效果。最后，结合垂直阵列二极管激光器的封装流程，对影响阵列快轴光束准直效果的因素进行了分析，指出了下一步工艺优化的重点。

关键词,二极管激光;巴条;垂直阵列;快轴准直;指向精度

中图分类号,TN248.1文献标志码,A文章编号,1007-2276(2011)11-2270-04

Fastaxisbeamcollimationofdiodelaser

GuoLinhui，GaoSongxin，LvWenqiang，WuDeyong，TangChun

(InstituteofAppliedElectronics,ChinaAcademyofEngineeringPhysics,Mianyang62190hi0n,a)CAbstract:Theoutputbeamofdiodelaserverticalstackhasthceharacteristicsofsmalldivergenceangleandhighpointingaccuracy,buttheadjustmenttechnologycannotmeettherequirementofdiodelaserverticalstackwithhigh-power.Beamclliomationmechanismofthefastaxiscollimation(FAC)microlenswasdescribedinthispaper,andtheparameterschofosenrdeviceandadjustmenotfslenswereanalyzed.Theimagesofdiodelaserbarbothinthenearfieldandfarfieldwerereal-timemonitoredthroughopticalimagingmethodstorealizecoarseandfineadjustmentsofFAClens,respetcively.Theoutputpowerofthe20-barverticalstackwas2kW,andthefarfielddivergenceangleoffastaxisclliomatedbeamwas4.4mrad,withthepointingaccuracyamongbaorsflessthan?1.7mrad.Finally,themoniteringprecisionandtheclliomationinfluencefactorswereanalyzed,andthekeyofoptimizationwaspointedout.

Keywords:diodelaser;bar;verticalstacks;fastaxiscollimation;pointingaccuracy

收稿日期,2011-03-07,修订日期,2011-04-03

基金项目,国家自然科学基金重大项目,中国工程物理研究院应用电子学研究所自研课题(2011JGZY0)5作者简介,郭林辉(1982)，男，硕士，