类蛛网状盘式谐振微陀螺的抗冲击性能与结构误差仿真分析.docxVIP

第6卷第5期2023年9月

飞控与探测

FlightControlDetection

Vol.6No.5September2023

类蛛网状盘式谐振微陀螺的抗冲击性能与

分析结构误差仿真*

分析

樊波1,2,郭述文3

(1.南华大学电气工程学院·衡阳·421001;

2.苏州大学微纳传感技术研究中心·苏州·251001;

3.华东光电集成器件研究所·蚌埠·233040)

摘要:具有导航级潜能的盘式谐振微陀螺是国际研究最热门的一类微机械陀螺,在此基础上设计了一款频率裂解小的类蛛网状盘式谐振微陀螺。通过有限元仿真软件进行了模态分析和冲击分析,仿真结果表明,类蛛网状盘式谐振微陀螺工作模态与寄生模态最小频差为3.9kHz,可承受的冲击载荷加速度高达25000g。此外,开展了晶向误差和工艺误差等结构误差对频率裂解影响的仿真研究,结果表明,其比圆环状盘式谐振陀螺在频率裂解上具有更低的结构误差敏感度。综上说明该结构能有效抑制寄生模态干扰、抗冲击性能强且结构误差鲁棒性好,具有较好的发展前景。

关键词:微机械;盘式谐振陀螺;抗冲击特性;结构误差;仿真分析

中图分类号:TH703;TP212.1文献标志码:A文章编号:2096-5974(2023)05-0014-9

SimulationAnalysisofImpactResistanceandStructuralErrorofMicroCobweb-LikeDiskResonatorGyroscope

FANBo1,2,GUOShuwen3

(1.SchoolofElectricalEngineering,UniversityofSouthChina,Hengyang421001;

2.Micro-NanoSensorTechnologyResearchCenter,SoochowUniversity,Suzhou251001;

3.EastChinaInstituteofPhoto-ElectronIC,Bengbu233040)

Abstract:Themicrodiskresonatorgyroscopewithnavigationlevelpotentialisthemostpopularkindofmicromach-inegyroscopeininternationalresearch.Onthisbasis,wedesignedamicrocobweb-likediskresonatorgyroscopewithsmallfrequencysplitting.Modalanalysisandimpactanalysiswereconductedusingfiniteelementsimulationsoftware.Thesimulationresultsshowedthattheminimumfrequencydifferencebetweentheworkingmodeandtheparasiticmodeofthemicrocobweb-likediskresonatorgyroscopewas3.9kHz,andtheimpactloadaccelerationitcanwithstandwasupto25000g.Inaddition,simulationanalysiswasconductedontheinfluenceofstructuralerrorssuchascrystalorientationerrorandprocesserroronfrequencysplitting.Theresultsshowedthatithadlowerstruc-turalerrorsensitivitythanthecirculardiskresonatorgyroscopeinfrequencysplitting.Insummary,thisstructurecaneffectivelysuppressparasiticmodeinterference,andhasstrongimpactresist