RealTemp200-manual原版完整文件.docx

DRT-210

RealTemp?200Manual

Version1.1

April2008

AboutVeeco

VeecoInstrumentsprovidesspecializedtechnicalproductsandservices(demonstratedonhttp:\\www.V).Veeco’sTurboDiscMOCVDSystems,locatedinSomerset,NJ,developsandmanufacturesMOCVDdevicesforclientsthroughouttheworld.

CopyrightNotice

TurboDisc?,RealTemp?200,EpiViser?andCarrierDesigner?arecopyrightedtrademarkpropertiesofVeecoCompoundSemiconductorInc.

Copyright?2008,VeecoCompoundSemiconductorInc.Allrightsreserved.

TurboDiscMOCVDSystems394ElizabethAvenue

Somerset,NJ08873

Phone:(732)560-5300

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Version1.0

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DisclaimersandLegalNotices

Thisdocumentdescribestheproper,safeoperationandmaintenancepracticesofhighlycomplextechnicalequipment.Everyefforthasbeenmadetoincludecompliantinstructions,warningsandguidelinestoensurethesafeandproductiveuseofthesystemsdescribedinthisdocument.

VeecoTechnicalPublicationshascarefullyreviewedthisdocumenttoensureitsreliabilityandcompleteness.Ifyoudiscoveranyerrorsoromissions,pleasecontact:

VeecoTechnicalPublicationsmailto:techpubs@

RealTemp

RealTemp?200Manual

PagePAGE\*roman

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Copyright?2008VeecoCompoundSemiconductorInc.

AllRightsReserved

Contents

CHAPTER1. GENERALINFORMATION 1-1

Section1.1 DeviceDescriptionandBasicParameters 1-1

Section1.1. Overview:TheBasicsofEmissivityCompensatedPyrometry 1-4

OpaqueSubstrates 1-6

TransparentSubstrates 1-6

WafercarrierandDiffuseReflectance 1-6

CHAPTER2. OPERATINGPROCEDURES 2-1

Section2.1. GeneralOperatingInformation 2-1

LoginLevels 2-1

OperatingScreenandControlLayout 2-1

Section2.2. QuickstartinProductionmode(Operato