特殊气体安全.ppt

W*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*JW*J*FilterMaterialsFiltermedia过滤材质 *Elastomeric塑料材质 *Ceramic陶瓷 *Metallic金属316LSSHastelloyC-22Nickel第九十四页，编辑于星期六：十四点十分。*PurifiersTherearetwotypesofpurifiers: 1.getter(metal) -regenerable 2.chemicalresin第九十五页，编辑于星期六：十四点十分。*Purifiers--ApplicationsEasymaintenance/changeSafetyLifetrackingbycylinderchangesIncreasepanelpipinglife(corrosion,contamination)Purgegaspurifierimprovescylinderpurge第九十六页，编辑于星期六：十四点十分。*Purifiers--ApplicationsOtherapplicationsEpi/CVDSputtering(metalapplications)TheremaybemultiplepurifierslocatedintheArgondeliverylines.Themetalprocessmustbeparticlefree.Ifparticlesarepresenttheycouldcauseshortsoropensinthemetallines.Corrosive/reactivegas第九十七页，编辑于星期六：十四点十分。*GasPropertiesChallengingFlowControlAmmonia(NH3) LiquefiedcompressedgasBoronTrichloride(BCl3) Liquefiedcompressedgas 第九十八页，编辑于星期六：十四点十分。*GasPropertiesChallengingFlowControlChlorine(Cl2) Liquefiedcompressedgas Diborane(B2H6) Compressedgas 第九十九页，编辑于星期六：十四点十分。*Dichlorosilane(SiH2Cl2) Liquefiedcompressedgas Disilane(Si2H4) Compressedgas GasPropertiesChallengingFlowControl第一百页，编辑于星期六：十四点十分。*GasPropertiesChallengingFlowControlHydrogenBromide(HBr) LiquefiedcompressedgasHydrogenChloride(HCl) Liquefiedcompressedgas 第一百零一页，编辑于星期六：十四点十分。*HydrogenFluoride(HF) LiquefiedcompressedgasNitrousOxide(N2O) LiquefiedcompressedgasSilane(SiH4) CompressedgasTungstenHexafluoride(WF6) GasPropertiesChallengingFlowControl第一百零二页，编辑于星期六：十四点十分。*TestingAnalysis测试及分析高纯气体管道需如下测试（尤其适用高危险性特气系统）：Presstest压力测试=1%drop@1.15designbar*24hrHeliumleaktest氦检漏测试cc.atm/sec(一个大气压下每秒泄漏??CC)，测试仪器AlcatelorInfocom针对６“Fab的特气系统通常2.0x10