微电子技术论文1-s2.0-S0924424716304654-main.pdfVIP

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微电子技术论文1-s2.0-S0924424716304654-main.pdf

SensorsandActuatorsA250(2016)219–228

ContentslistsavailableatScienceDirect

SensorsandActuatorsA:Physical

journalhomepage:www.elsev/locate/sna

Aprism-basednon-linearopticalreadoutmethodforMEMS

cantileverarrays

UlasAdiyana,∗,FehmiCivitcib,GoksenG.Yaraliogluc,HakanUreya

aKoc¸University,Istanbul,Turkey

bIst

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