原创力文档应用说明：六氟化钨（WF6）在半导体制造中的潜力 Application Notes The Potential of Tungsten Hexafluoride (WF6) in Semiconductor Manufacturing.pdfVIP
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ApplicationNotes:ThePotentialofTungsten
Hexafluoride(WF6)inSemiconductor
Manufacturing
Author:BenchChemTechnicalSupportTeam.Date:April2026
CompoundofInterest
CompoundName:Tungstentrifluoride
CASNo.:51621-17-1
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