太阳能电池材料铜铟镓硒薄膜制备工艺和结构研究.pdfVIP

太阳能电池材料铜铟镓硒薄膜制备工艺和结构研究 摘 要 以CIGS作为吸收层的太阳能电池，因其诸多优异性能而成为最具潜力的第三 代太阳能电池 。本文介绍了CIGS薄膜的性能与掺杂对电池的影响,讨论了多种薄 膜沉积技术及其优缺点。 由于 CIGS 薄膜太阳能电池成本低、性能稳定、抗辐射能力强，其光电转换 效率目前是各种薄膜太阳电池之首，光谱响应范围宽，在阴雨天光强下输出功率 高于其它任何种类太阳电池，被国际上称为下一时代最有前途的廉价太阳电池之 一，有可能成为未来光伏电池的主流产品之一 。然而制备高效 CIGS 电池的关键 之一是要获得高质量的 CIGS 多晶薄膜.本论文针对磁控溅射法制备的 CIGS 多晶 薄膜进行了研究。 本课题研究了在玻璃基体上用磁控溅射的方法制备铜铟镓硒（简称 CIGS ） 导电薄膜可能性。通过变换各种工艺参数如镀膜时的溅射气压、溅射速率、硒化 温度、硒化时间等，研究膜层的厚度、成分和性能的变化情况。用扫描电镜 （SEM） 等检测手段对薄膜进行组织形貌分析，用能谱仪分析薄膜所含元素，应用光谱吸 收测量仪测试膜的光谱吸收率，用电阻测量仪测量膜的电阻率。 之后结合实验结果， 研究不同的工艺参数对薄膜厚度、成分、光谱吸收率和 电阻率的影响。 关键词: 太阳能电池材料、CIGS 薄膜、磁控溅射、制备工艺、 结构特性 I 太阳能电池材料铜铟镓硒薄膜制备工艺和结构研究 Abstract CIGS based solar cells become the most promising solar cells in tertiary generation solar cells with their so many virtues. The photovoltaic effect revealed in the fabricated structures is discussed. In this article, we discussed the influence of doping to battery to the thin film and discussed the good and bad points of many different deposition technologies of the thin film. CIGS is a promising material for thin-film solar cells. Much of current research is focusing on it .Because CIGS offer some advantage over other semiconductors in their application to photovoltaic technology，such as high efficiency, stable and cost-effective .However, a key factor of fabricating high-efficiency CIGS solar cell is gaining high-quality CIGS polycrystalline thin films. This topic studied the possibility of making CIGS polycrystalline thin films up by magnetron sputtring. We research film thickness and the situation of ingredient changing through transforming each technological parameter such as the time in coatings voltage, electric current, vacuum chamber pressure, target material and furnace atmosphere and so on. Using examination