诱导磁场对化学沉积Co-Ni-P薄膜磁性能的影响.docVIP

  诱导磁场对化学沉积 Co-Ni-P 薄膜磁性能的 影响# 王海成1，龚占双2* 5 10 15 20 （北京科技大学材料科学与工程学院，北京, 100083） 摘要：采用化学湿法沉积技术制备了 CoNiP 磁性薄膜，研究了施镀过程中的诱导磁场对 CoNiP 薄膜磁性能和结构的影响。研究结果表明，随着施加诱导场强度的增加，CoNiP 薄 膜的矫顽力先增加，然后减小；当磁场强度为 1300 Oe 时，薄膜的矫顽力达到了 751.7 Oe ， 比未施加磁场时提高了约 28%。X 射线衍射结果表明，Co-Ni-P 薄膜晶粒沿磁场方向生长， 其 c 轴沿薄膜的轴向形成了很强的 Co（002）织构。 扫描电子显微镜表面形貌观察表明， 随着磁场强度的增加，胞状颗粒逐渐增多，晶粒尺寸变小，颗粒之间结合紧密。诱导磁场 对 CoNiP 薄膜的磁性能有良好的促进作用，这为进一步开发高性能的磁电传感器奠定了一 定基础。 关键词：磁性薄膜； 诱导场；化学沉积；CoNiP 中图分类号：TB332 The Influence of Inducing Magnetic Fields on Electroless CoNiP Thin Films Magnetic Properties WANG Haicheng, GONG Zhanshuang (Schoolof Material Science and Engineering, University of Science Technology Beijing, Beijing 100083) Abstract: Magnetic CoNiP films were prepared by electroless wet chemical deposition in this paper. The influence of inducing magnetic fields on CoNiP films magnetic properties and microstructure was studied. The results showed that, the coercivity of CoNiP films first increasesd 25 30 and then decreased with increasing of inducing magnetic fields. The film coercivity reached 751.7 Oe when the magnetic field got 1300 Oe, and increased by about 28% than that when no magnetic field applied. X-ray diffraction results showed that, Co-Ni-P film grains grew along the field direction, and formed a strong Co (002) texture along the c-axis. Field emitting scanning electron microscopy surface morphology showed that, the cellular particles gradually increased, grain size became small and integrated tightly with the increasing of magnetic field strength. Induced magnetic field played a good role in promoting the magnetic properties of CoNiP thin films, which would lay a certain foundation for further development of high performance magnetic sensors. Key words: magnetic films; induced magnetic field; chemical depostion; CoNiP 35 0 引言 在化学湿法沉积或真空镀膜过程中，外加诱导磁场可在一定程度上影响薄膜材料 的微观结构和性能 [1-2]。Lee 和 Chou 等人在γ -Al2O3 粉末上化学镀 Ni 过程中施加诱导 磁场发现，反应动力学 [3]、沉积速率 [4]和次亚磷酸根离子的氧化速率常数 [5]均随着磁  40 场的变化而变化。Osaka[6]和 Mogi[7]等人在化学镀 Ni