大载荷下线振动微机械陀螺谐振频率漂移特性.pdfVIP

第21 卷第2 期 中国惯性技术学报 Vol.21 No.2 2013 年4 月 Journal of Chinese Inertial Technology Apr. 2013 文章编号：1005-6734(2013)02-0231-04 大载荷下线振动微机械陀螺谐振频率漂移特性 王 巍，庄海涵，邢朝洋 （中国航天电子技术研究院，北京 100094 ） 摘要：线振动 MEMS陀螺在大载荷条件下，驱动轴与检测轴的谐振频率会发生漂移，频差随载荷变大。 这类型振动陀螺为了提高灵敏度往往将两个振动轴的谐振频率设计得尽量靠近，但当角速率载荷较大 时，两个振动轴的谐振频率将发生分裂漂移，彼此互相远离。漂移量与向心加速度无关， 近似与角 速率载荷的平方成正比，且两轴的谐振频率越靠近漂移越剧烈。考虑到 Coriolis 效应的弹簧质量块 二维振动数学模型可定量描述该现象，表明此现象为线振动陀螺 Coriolis效应的一部分。理论分析、 仿真研究和实验数据的不同角度对这种频率漂移特性的分析结果吻合良好，为进一步结构优化奠定了 理论基础。 关 键 词：MEMS 陀螺；大载荷；谐振频率漂移；Coriolis 效应；二维振动 中图分类号：V241.5 文献标志码：A Resonant frequency drift characteristics of straight-line vibration MEMS gyro under heavy load WANG Wei, ZHUANG Hai-han, XING Chao-yang (China Academy of Aerospace Electronics Technology, Beijing 100094, China) Abstract: The resonant frequencies of a straight line vibration gyro would generate drifts between drive axis and sense axis under heavy angular velocity load. The two frequencies are always designed to be close to get a high sensitivity. But when the angular velocity load is heavy, the resonant frequencies in two axes will drift apart from each other. The amount of the drift has no relationship with the centripetal acceleration, but be proportional to the square of the angular velocity load, and be more drastically when the two resonant frequencies are closer. In this paper, two-dimension vibration differential equations were derived to represent this phenomenon by considering the Coriolis influence, and it is indicated that the drift is caused by the Coriolis influence. The analy