应力变化对多层薄膜窄带滤光片透射光谱的影响.pdfVIP

12 4 V ol. 12 N o. 4 2004 8 Opt ics and Pr ecision Eng ineering Aug. 2004 1004924X 2004) 王 成, 张贵彦, 肖孟超, 马 莹, 钱龙生 中国科学院长春光学精密机械与物理研究所, 林 长春 1300 33) : , , , 200 M Pa 138 4 100 GHz , 0. 562 nm ; 0 . 5 dB 0 . 124 nm ; 25 dB 0 . 01 nm ; ; 100 GHz 0. 325 nm; 0. 5 dB 0. 0 1 nm ; 20 dB 0 . 014 nm ; , , , : 光学薄膜; 光谱退化; 窄带滤光片; 应力 : O4 84 . 4 : A Influences of stress changes on transmission characteristics of multilayer thinfilm narrow bandpass filters WAN G Cheng, ZHA N Guiyan, X IA O M engchao, MA Y ing, QIA N G Longsheng ( Chang chun Inst it ute of Op tics , Fine M echanics and Physics , Chinese A cade my of Scie nces, Chang chun 130033, China) Abstract: On t he base of film st ress formula and microbending principle of elast icit y, the relat ion bet ween multilayer film strain and f ilm t hickness w as analyzed. A mat hematic model was est ablished, and a new theory that t hickness of multilayer film chang es disunif orm was brought forward. By using this model, t he spect rum of 100 GH z f ilt er w ith 138 layers and 4 cavities w as simulated w hen t he stress decreased by 200 M Pa. Compared w ith t he designed value, it w as found t hat central w aveleng th increased by 0. 562 nm, bandw idth decreased by 0. 124 nm at 0. 5 dB and 0. 0 1 nm at 25 dB, rectangular spectrum deformed , and insert loss increased apparent ly. T hese demonstrated that uneven f ilm t hickness caused by st ress change was the main reason that caused spectrum of narrowband int erference f ilt er t o degrade. Ex periment al result s w ere t hat cent ral w avelengt h of 100 GHz narrowband filter increased by 0. 325 nm aft er heat t reat ment, bandw idth decreased by 0. 01 nm a