MEMS微针制备技术及其工艺研究.pdfVIP

A Dissertation Submitted to Shanghai Jiao Tong University for the Degree of Master The technology of preparation of MEMS micro-needle and research of its Process Author ：Jiang Hongmin Specialty: Microelectronics Advisor Ⅰ: Prof. Zhao xiaolin Advisor Ⅱ: Associate Prof. Zhu Jun Research Institute of Micro/Nano Science and Technology Shanghai Jiao Tong University Shanghai, P. R. China January 12th, 2009 MEMS 微针制备技术及其工艺研究 摘要 微针作为一种新型 MEMS 器件，在生物医学领域具有广泛的应用需 求。从制备工艺来划分，微针可分为异平面微针与同平面微针。异平 面微针可以加工成阵列结构，因而在微针经皮给药应用时药物可以在 皮肤上大面积分布，具有较强的给药能力。异平面微针属于特殊的三 维微结构，传统平面微加工工艺不能满足其结构要求。本论文从国内 外的微针制备的研究现状分析，从现有微针加工过程中存在的不足出 发，在对背面曝光和倾斜旋转曝光的理论研究的基础之上，开展相应 的实验研究，期望在对两种方法深入研究的基础之上，能够开发简便 易行的微针制备技术。通过改进实验室现有设备，实现 SU8 胶的倾斜 旋转曝光，并以 SU8 光刻胶结构为模具通过图形转移制备了 PDMS 异平 面圆锥形微针阵列，以此工艺为基础进一步尝试 Ni 异平面圆锥形实心 微针阵列和环氧树脂异平面空心微针的制备。 关键词：背面曝光，倾斜旋转曝光，异平面空心微针 - I - The technology of preparation of MEMS micro-needle and research of its Process Abstract Micro needles have become an attractive topic of MEMS research. Micro needles can be classified into two type, they are in-plane and out-of-plane microneedle repectively. The in-plane type generally has only one row of needles, and the out-of-plane needles can contain arrays of microneedle. The out-of-plane needles allow for drug distribution over a large area of skin. Out-of-plane micro-needle has a special three-dimensional micro-structure, so the traditional planar microfabrication technology can not meet its requirements. In this