台阶覆盖工艺中0.6μm接触孔刻蚀形貌对ALSICU的填充效果的影响.pdfVIP

Dissertation Submitted to Shanghai Jiao Tong University for the Degree of Master THE SHAPE OF 0.6UM CONTACT’S EFFECT ON ALSICU FILLING IN THE PROCESS OF STEP COVERAGE Candidate Gao Jing Ru Student ID: 1082102038 SchoSupervisor Associate Prof. Zhu Yi Ming Assistant Supervisor: Huang Jian Qiu Academic Degree Applied for Master of Engineering Speciality IC Circuits