氧化钛湿敏元件建模及其优化方法研究.pdfVIP

Abstract Rare earth ion doped pure Titania in high ion field intensity and composite ceramics are chosen in the experiment. Sol-gel method and fritting method are applied in making porous thick films and thin films on the ceramic substrate surface with electrode, and dew cell using in humidity measurement are constructed. Dew cell’s circuit should be primary modeled for a better research of humidity sensors structure and performance, and complex impendence method is used in the paper. Each kind of definite electric circuit model has a related complex impedance plot. Corresponding complex impedance plot of empirical datum can be drawn by Origin graphics software. By comparing the complex impedance plot related to empirical datum with ideal electric circuit model, the electric circuit model which characteristics most closely to the plot can be discovered. The results indicate that Titania humidity sensor whose complex impedance plot is composed with one or two semicircles, or part of them. An equivalent circuit model can be associated with three resistors and two capacitors which combined with series-parallel style. Then equivalent circuit analysis system is programmed based on VB programming language. By cut and try method, the feasibility of equivalent circuit is analyzed, and the influence of each parameter to the complex impedance plot is obtained through changing each parameter values. Real axis coordinate and the circular arc size of plot are changed separately by resistance, and the existence form of circular in the plot is changed by capacity. Two methods are adopted in optimization. Firstly, co