2014年Microelectromechanical Systems (MEMS).pptVIP

Microelectromechanical Systems (MEMS) * * Professional English in Microelectronics Technology 8.1 * * Professional English in Microelectronics Technology This chapter deals with the emerging field of micro-electromechanical systems, or MEMS. During the past decades, several new fabrication techniques have evolved which helped popularize MEMS, and numerous novel devices have been reported in diverse areas of engineering and science. MEMS is a process technology used to crate tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrate