磁过滤直流真空阴极弧沉积类金刚石膜结构和力学性能的研究.docVIP

磁过滤直流真空阴极弧沉积类金刚石膜的结构和力学性能研究 祝土富，沈丽如，徐桂东 （核工业西南物理研究院，成都 610041） [摘要] 采用磁过滤直流真空阴极弧沉积技术在不锈钢基体上制备了类金刚石（DLC）膜。利用光学显微镜、台阶仪、X射线光电子能谱、Raman光谱、显微硬度计、摩擦磨损仪、洛氏硬度计检测了薄膜的表面形貌、厚度、结构和相关力学特征。结果表明，膜中仍然存在着um级的大颗粒分布，膜厚为290nm，sp3键含量较高，在空气中的摩擦系数约为0.25，耐磨性能优良，膜与基体的结合性能良好。 [关键词] 磁过滤真空阴极弧；DLC膜；结构；摩擦磨损性能 Micro-structure and Mechanical Properties of Diamond-like Carbon Films Deposited by DC Filtered Cathodic Vacuum Arc Technology ZHU Tufu, SHEN Liru, XU Guidong ( Southwestern Institute of Physics, chendu 610041, China ) [Abstract] Diamond-like carbon (DLC) films were deposited on stainless steel substrate by DC filtered cathodic vacuum arc technology. The structure and morphology of the films were studied by X-ray photoelectron spectroscopy(XPS), Raman spectroscope and optical microscope. The thickness of the films was measured by surface profilometer.The mechanical properties were investigated by ball-on-disk tribometer, micro hardness tester and Rockwell apparatus. The results showed that there were still some large particulates with magnitude of microns existed in the films. The thickness of the films was 290 nm. The content of sp3 bonding carbon atoms was quite high. The Friction coefficient of the films was about 0.25. The films exhibited excellent wear resistance. The adhesion of the films to substrate was very well. [Keywords] filtered cathodic vacuum arc; DLC films; structure; friction and wear behaviour 引言 类金刚石（DLC）,它的产品广泛应用在机械、电子、光学和生物医学等各个领域。DLC膜的沉积温度低、表面平滑，具有比金刚石膜更高的性价比,在相当广泛的领域内可以代替金刚石膜，自80年代以来一直是镀膜技术领域研究的热点。 制备DLC膜的主要方法有：离子束沉积法(ion beam deposition(IBD))、磁控溅射沉积法(magnetron sputtering deposition(MSD))、真空阴极弧沉积(cathodic vacuum arc de position(CVAD))法、脉冲激光沉积法(pulsed laser deposition(PLD))、等离子体增强化学气相沉积法(plasma enhanced chemical vapor deposition(PECVD))等。 真空阴极弧沉积由于具有离化率高、沉积速率高、沉积离子能量高、膜基结合力好、沉积温度低、可通过在基体上加负偏压使沉积能量在大范围内可调节等优点,广泛应用于超硬膜的制备。但是阴极弧放电剧烈, 不但产生高密度的等离子体,而且产生大量尺寸为0.1—10um的宏观粒子。这些大颗粒镶嵌在薄膜或散布于薄膜表面,大大降低了薄膜的物化性能。磁过滤真空阴极弧(Filtered Cathodic Vacuum Arc Deposition(FCVAD))是在真空阴极弧技