钛合金表面磁控溅射与多弧离子镀TiN膜摩擦学性能比较.pdfVIP

20 6 Vol.20 No.6 2007 12 CHINA SURFACE ENGINEERING Dec. 2007 14 2007 TiN * 1 1 2 1 1 (1. 710072; 2., 266042) (MS)(MAIP)TC4 TiN – SEM TiN TiN TiN TiN Ti TiN TiN TG174.44 A 1007–9289(2007)06–0014–05 A Comparison of the Tribological Properties Between Magnetron Sputtering and Multi-arc Ion Plating TiN Films on Titanium Alloy 1 1 2 1 1 XI Yun-tao , LIU Dao-xin , LI Mei-ying , ZHANG Xiao-hua , TAN Hong-bin (1.Corrosion and Protection Research Lab, Northwestern Polytechnical University, Xian710072, China; 2. Qingdao Hygain Chemical Group Co., Ltd, Qingdao 266042, China) Abstract: The TiN films were deposited on the TC4 titanium alloy surface using magnetron sputtering (MS) and multi-arc ion plating (MAIP) respectively. Their bonding strength and supporting capacity under static and dynamic load conditions were evaluated using scratch instrument, microhardness tester and multiple impact tester. The tribological properties of the films were investigated using a ball on disk wear tester. The wear scars were analyzed by scanning electron microscope (SEM). The wear volume of specimens was measured using a profilometer. The results showed that the surface microhardness and supporting capacity of titanium alloy substrate could be improved by both magnetron sputtering and multi-arc ion plating TiN films. The magnetron sputtering TiN film had a smoother surface and a compact microstructure; therefore it had a good lubricating function. However, the friction coefficient of the MS TiN film was increased gradually during the wear p