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251 Vol. 25 No. 1
20 032 PIEZOELECT RICS A COUST OOPT ICS Feb. 2003
: 1004-2474( 2002) 06-0064-04
雷伏容, 程 昱, 钟宜生, 徐文立
( , 100084)
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: T M301. 2: A
Status of Modeling for Ultrasonic Motors
LEI Fu-rong, CHENG Yu, ZHONG Yi-sheng, XU Wen-li
( Dept . of Automation ,T sin hua U niversity, Beijin 100084, Chin a)
bstract: In this paper , the struct ure and t he operation principle of ult rasonic mot ors are introduced firstly .
Then the main methods developed in recent y ears of modelin for ult rasonic motors, includin equivalent circuit
modelin , theoretic analy sis modelin and identificat ion m odelin , are review ed. Finally, the development t rends of
modelin for ultrasonic motor are stated.
Key words: ultrasonic motor ; modelin ; system identification
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