微桥热传感器测微小气压地研究.pdfVIP

第十一届全国实验力学学术会议 大连 2005 微桥热传感器测微小气压的研究* 1 1 2 1 2 张凤田 ，唐祯安 ，金仁成 ，余隽 ，江胜峰 （1.大连理工大学 电子工程系， 辽宁 大连 116024 ； 2.大连理工大学 微系统与微制造重点实验室， 辽宁 大连 116024 ） 摘要：随着微机电系统(MEMS) 的发展，用于气体压力测量的硅微传感器引起了人们的极大 关注。但传统气压微传感器由于基于变形原理很难用于微小气压的测量。本文根据气体动力 学，利用在一定范围内气体导热与气压大小成比例的关系，采用表面微机械加工技术和 CMOS 工艺研制了一种微桥热传感器，可以测量微小气压。详细介绍了热传感器测量气压的原理， 并通过在真空系统中对所研制的传感器进行测试，研究了在电桥加热模式下，传感器的响应 特性及加热电压对其特性的影响。研究结果表明，传感器灵敏度随加热电压升高而增加，可 以测量 100Pa～105Pa 范围内的气体压力，且具有尺寸小、响应快、结构简单、易与电路集 成等优点，有广泛的运用前景。 关键词：微桥；热传感器；气压传感器；表面微机械加工 Measurement of Low Gas Pressure with Micro-bridge-based Thermal Sensor 1 1 2 1 2 Fengtian Zhang , Zhenan Tang , Rencheng Jin ,Jun Yu , Shengfeng Jiang (1. Department of Electronic Engineering, Dalian University of Technology, Dalian, 116024; 2. Key Laboratory of Microsystem and Micro-fabricating Technology, Dalian University of Technology, Dalian,116024) Abstract: Much attention has given to silicon microsensors for gas pressure measurement due to the development of MEMS technology. It is difficult to apply traditional gas pressure microsensors to low gas pressure measurement because their sensitivities mainly depend on membrane distortion. This paper develops a micro-bridge-based thermal sensor for low gas pressure measurement with surface micromachining technology and CMOS processes, based on the principle that gas thermal conductivity is proportional to gas pressure in a certain range according to gas dynamic theory. The bridge is 230um long and 20um in width. The air gap below is 0.5um wide. The measuring principle of thermal sensor used for gas pressure measurement and its fabrication processes are presented detailedly, then the