用于研制纳米长度标准的激光准直原子技术研究.pdfVIP

第 43卷 第 9期 红外与激光工程 2014年 9月 VO1．43NO．9 InfraredandLaserEngineering Sep．2014 Collimationofatomicbeam forthefabricationofnano．scale length standards MaYan，XiaoShengwei，ZhangWanjing (ShanghaiKeyLaboratoryofSpecialArtificialMicrostructureMaterialsandTechnology，DepartmentofPhysics， Ton~iUniversity，Shanghai200092，China) Abstract：To meetthe requirementofNano—scaledimensionalmetrology，length standardswiht features below 100nanometerswere indispensibleinstruments．Thelenght standardswiht periodiclength of213+ 0．1Bin were successfully fabricated through atom lihtography，which wasconnected to atomictransition frequency na d htusrertaceableto aconstantmeasured wiht highly accuracy．Forfurtherimprovementof the quality ofthese standrads，hte evaluation and optimization of collimating the atomic beam were describedinhtisarticle．A knife—edgewassettled to cuthteatomicbeam collimatedbyhtelaserDoppler cooling．The fluorescenceofthebeam wascollected to calculateitsangulra distribution andequilibrium transversetemperature．Thestimulated absorptionratewasconsidered and discussed．Fullangularwidthat halfmaximum assmallas0．544mrad wasobserved，corresponding totemperatureof343．8 I．zK．Several angulra distributionsweremeasuredbychnaginghtelaserchraacteristicstooptimi zehtecollimation． Key words：atom lithography； Dopplercooling； rtansversetemperature； knife-edge； angulardistribution CLC number：0436 Documentcode：A ArticleID：1007—2276(20l4)09—2929—06 用于研制纳米长度标准的激光准直原子技术研究 马 艳 ，肖胜炜，张万经 (同济大学 物理科学与技术学院上海市特殊人工微结构材料与技术重点实验室，上海 200092) 摘 要 ：亚百纳米长度计量标准是实现在纳米尺度精确计量的关键器件。我们课题组已利用原子光 刻技术研制出了周期为 213_+0．1nm 的光栅，该光栅的周期对应于原子的跃迁频率，具有直