非平衡磁控溅射技术制备用于红外减反射的无氢碳膜_英文_.pdfVIP

25 6 110 Vol1 25 No1 6 Journal ofMaterials Science Engineering Dec. 2007 Article ID: 167322812(200704 Hydrogen2free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti2reflection Coatings 1,2 1 2 2 XU Jun2qi , FAN Hui2qing , LIU Wei2guo , HANG Ling2xia ( 1. State Key Laboratory of Solidification Processing, Sc ool of Materials Science and Engineering, Nort western Polytec nical University, Xi. an 710072, C ina; 2. Sc ool of Opto2 electronic Engineering, Xi. an Tec nological Univer sity, Xi. an 710032, C ina) =Abstract The hydrogen2free diamond2like carbon (DLC) films are potential materials to be used as infrared ant2i reflection protective coatings iftheir optical absorption can bereduced to get relatively thick films needed. In this study, hydrogen2free DLCfilms were deposited in an unbalanced magnetron sputtering( BMS) system. Theresults offilmthickness uniformity showedthat this system is capable of depositing uniform films larger than 150 mm in diameter. The infrared transmission spectra of DLC films indicating that transparent films were obtained intheinfrared region for the single side DLC coated onthe silicon and germaniumsubstrates, andabout 68.83% and63.05% transmittance were achieved respectively at thewave number of 2983P cm, close to theoretical value for non2 absorption carbon material. No obvious absorption peaks were found between 5000 and 800 Pcm. These excellent characteristics show that the hydrogen2 free DLC films prepared in the BMSsystem were suitable for infrared transmission enhancement applications. = Key w