超精密测量关键技术的研究动态_胡礼广.pdfVIP

超精密测量关键技术的研究动态 浙江师范大学交通学院( 321019) 胡礼广 蒋洪奎 超精密测量是超精密加工中的重要一环, 目前其研究的内容主要涉及光干涉技术电 学测量技术以及 描探针技术等几个方面, 本文主要介绍了几种测量技术的工作原理设备技 术等方面的研究及进展情况 超精密测量 光干涉 电学测量 扫描探针 Research Tendency of Ultra Precision Measurement Key Technology Abstract Ultra-precision measurement is the im portant part of ultra-precision machining. The study of ul- tra-precision measurement mainly involves opt ica-l interferometer technology, electricity- measurement technol- ogy and scanning-pro e t echnology. The operational principle of several measurement t echnologies and re- search status of equipment technology are descri ed. Keywords ultra- precision measurement, interference of light, electricity-measurement, scanning pro e : TH74 :A ( 0192 nm , 03 ~ 003 m, R a 003 ~ 5 pm, 0005 m) ( 003 m, 100~ 200 m, X R a 0005 m) , , , , , W arw ick D G. Chetwynd , , X , , , 10 m, nm X , , NPLPTB IM GC 3 X , X , , X ( Com ined Optical and X-ray Interfer- ometer, COXI) , 2 1 11 X X Hart 1968 , 1 3 , X Brag , n= 2d sin, d , 2 X A 2 / 1 X 2 , 4, 158 nm, X 824 , 100 , , 2 pm , 10 14 2006 5 m 10 pm ; 1 mm 100 pm Andreq. t, r Yacoot Michael J. Downs COXI NPL Jarain , Jamin 80 pm ; , 20 pm , X , 12 Fehra-Perot F-P 4 2 10 mm, 100 kHz, , 1 nm , L L f