0.6m段四个量级真空差分系统实现.pdfVIP

4 48 VACUUM2003 7 0.6 m 段四个量级真空差分系统的实现 周洪军, 霍同林, 张国斌, 戚则明, 王秋平 (, 230029) :, 0.6 m , :; ; :TL505:B: 1002-0322(2003)04-0048-02 0. 6 m long differential pumping system with 4 orders of pressure differential is obtained ZHOU Hong-jun, HUO Tong-lin, ZH NG Guo-bin, QI Ze-ming, W NG Qiu-ping (N ational Synchr otr on R ad iat ion L aboratory , Un iv er sity of Scie nce and Tech nology of China, H ef e i 230029, China) 0. 6 - Abstract: m long differential pumping system used in the spectral radiation standard and metered beam line is de- scribed The most challenging problem of designing is to guaranteefour orders of pressure differential at two ends of the sys-. tem and the SR going through at the same time. The measured and calculated data are compared in detail. Key words:vacuum differential pumping system; SR (synchrotron radiation) ; beam line , 1 800 MeV , X , ,0.6 , m , 22 mm12mm , 1 , , 25 cm, 22 mm12 mm20 (SGM) , 5 , 120 nm, (Seya) , 2 2 a b U = 30.9K (L /s) 60400 nm