铝-改性氟塑料复合薄膜的制备.pdfVIP

真 　空 　科 　学 　与 　技 　术 　学 　报 第 25 卷 　第 6 期 454 　　　　　　　　　　　 ( ) 　　　　　　 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY CHINA 2005 年 11 、12 月 　 铝/ 改性氟塑料复合薄膜的制备 龚朝阳 　程 　璇 　张 　颖 　罗学涛 　张 　莹 (厦门大学材料科学与工程系 化学系 固体表面物理化学国家重点实验室 　厦门 　361005) Aluminum Coating on Modified Fluorinated Polymer Composite Films Gong Chaoyang ,Cheng Xuan ,Zhang Ying ,Luo Xuetao and Zhang Ying Department of Materials Science and Engineering , Department of Chemistry , State Key Laboratory for Physical Chemistry of Solid Surfaces , Xiamen University , Xiamen , 361005 , China 　　Abstract 　Aluminum film was grown on modified fluorinated polymer composite films by rf magnetron sputtering. Surface morphology and composition of the A1 film were characterized with field emission scanning electron microscopy ( FESEM) and energy dispersive spectroscopy ( EDS) to optimize A1 film growth conditions. The results show that the sputtering power significantly affects the compactness of the A1 film. Low sputtering power results in less compact A1 film and weak interfacial adhesion ,whereas high sputtering power overheats and considerably bends the composite films. We found that sputtering pressure and sputtering time determine the deposition rate and thickness of the A1 film ,re spectively. 　　Keywords 　Modified fluorinated polymer ,Magnetron sputtering ,Surface treatment ,Composed thin film 　　摘要 　采用射频磁控溅射技术在改性氟塑料表面沉积铝层 ,制备了金属/ 氟化高聚物复合薄膜。利用场发射扫描电镜 ( ) ( ) FESEM 及能量散射谱 EDS 分析仪对沉积的铝层进行了表面形貌的表征和化学组分的分析。初步探讨了溅射功率、气压和 时间等不同溅射参数对铝层结构和铝层在氟塑料表面附着情况的影响。结果表明 :溅射功率是决定复合薄膜质量的重要因 素 ,功率过低得不到致密的铝层结构 ,而且铝层容易从氟塑料表面