Benefit Analysis of Process Oriented Basis Representation as a Method of Multivariate Stati.pdfVIP

Benefit Analysis of Process Oriented Basis Representation as a Method of Multivariate Statistical Process Control Amanda Schmitt Harold and Inge Marcus Department of Industrial and Manufacturing Engineering The Pennsylvania State University University Park, PA 16802 U.S.A. Dr. Russell Barton Department of Management Science and Information Systems The Pennsylvania State University University Park, PA 16802 U.S.A. Abstract Process-Oriented Basis Representation (POBREP) is an effective method of multivariate statistical process control that is seldom used in manufacturing. Rather than monitoring individual process variables, POBREP seeks to identify specific causes of production problems and map those into a basis matrix. These patterns can then be monitored with single -variable SPC techniques or traditional multivariate methods. This article discusses the benefits associated with this method, including improved diagnosing capabilities and more efficient SPC results. Simulation-generated multivariate data is used to compare POBREP with other methods, and a practical illustration is based on semiconductor chip manufacturing. Keywords Statistical Process Control , Multivariate SPC, Process Diagnostics 1. Introduction to the Problem 1.1 Overview Multivariate statistical process control is an area of increasing importance for which analysis methods continue to evolve. Process -Oriented Basis Representation (POBREP) is a method that looks to encompass the complexity of multivariate