Silicon micro-cantilever chemical sensors fabricated in double-layer silicon-on-insulator (SOI) wafer》.pdfVIP

Microsyst Technol DOI 10.1007/s00542-015-2480-0 TECHNICAL PAPER Silicon micro‑cantilever chemical sensors fabricated in double‑layer silicon‑on‑insulator (SOI) wafer Chuanzhao Chen1,2 · Ying Chen1 · Pengcheng Xu1 · Xinxin Li1 Received: 13 February 2015 / Accepted: 26 February 2015 © Springer-Verlag Berlin Heidelberg 2015 Abstract Micro-cantilever piezoresistive sensors are 1 Introduction optimally designed and fabricated in a double-layer silicon- on-insulator (SOI) wafer. The sensor geometry is optimized Detection of dangerous gases an