CVD法纳米硅系复合薄膜的微结构、性能及其新型无光污染节能镀膜玻璃分析.pdf

塑婆查兰堕主堂垡堡奎—— ～ 镀膜玻璃的平均反射比为27．7％，平均透射比为33．O％ 关键词纳米复合薄膜退火处理微结构光致发光梯度化减反射 ABSTRACT _ ’， andbasic of Inthis method ’ thesis，thehistory,structure，preparationproperties and siliconhavebeen materials nano—composite photoluminescenceofnanocrystalline also ofthenovel has summarized．Research antireflectingenergy coatingglass saving been presented． Si／SiC filmsare with and aSthesource The Sill4C2I-h gasby compositeprepared chemical annealing，the pressure vapordeposition(APCVD)．Then，by atmosphere films ofthe on Si／SiC／Si02 are influence nano—compositeprepared．The post—heating the ofthe the ofthe has beenstudied means microstructurefilmssystematicallyby are in of foundembeddedthe measurementsHREM．The amorphous nano—crystals of and