EffectofHighPressureDeuteriumAnnealingon-Sematech.PDFVIP

Effect of High Pressure Deuterium Annealing on Performance and Reliability of MOSFETs with High-k Gate Dielectrics and Metal Gate H. Park, M. Chang, H. Yang, M. S. Rahman, M. Cho, B.H. Lee*, R. Choi*, and H. Hwang 2004. 12. 3. 2004. 12. 3. Gwangju Institute of Science and Technology, KOREA, *SEMATECH Outline A. Effects of high pressure annealing on Hf-based gate dielectrics A. Effects of high pressure annealing on Hf-based gate dielectrics Improvement of device performance Eff