新型锁存射频微机械开关的设计和工艺研究.pdf

ofaNovelRFMEMS Switch andProcess Latching Design XingXianglong ProfessorJiaoliwei Directed Yuelm Wang by：Professor Abstract RF switchis switch Anovel shuntMEMS presented．The elec柱ostatic，capacitively ofthe membraneundercritical utilizesthe effec