新型解耦式微陀螺的研究和设计及关键制造工艺的开发.pdf

Abstract Micro the ratesensoror sensor,have angular angular gyroscopes，as for attracteda havebeenused greatattention．Developedproducts as stabilizationandautomotivedevices， applications，suchimage safety and the ofan rotation，the navigationguidancesystems．Inpresenceangular istransferredfromdrivemodetosensemodeduetoCorioliseffects， energy sensemodeis thensensed the of byvibratory displacementchange of limitationsofMEMS toobtainthe information．Onethe gyroscope angular modeand isthemechanicalbetweendrive gyroscopeperformance coupling of sensemode．Lotsofarticlesrefertomechanical rare error，but coupling these the errormodelfor papersstudycoupling partiallydecoupledgyroscope and fullydecoupledgyroscope． Inthis mechanical in the thesis，the coupling partiallydecoupled and hasbeen the decoupledgyroscope investigated，and gyroscopefully errormodelhasbeenbuilt．In decoupledgyroscope，we coupling partially assumethatthe the totheactualvibrationdirectionis springalongorthogonal