原创力文档High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM.pdfVIP
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High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM.pdf
Hindawi Publishing Corporation
Advances in Materials Science and Engineering
Volume 2012, Article ID 180437, 13 pages
doi:10.1155/2012/180437
Research Article
High Spatial Resolution Time-of-Flight Secondary Ion Mass
Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS
Instrument with In Situ AFM
1 1, 2 1 1
¨
James A. Whitby, Fredrik Ostlund, Peter Horvath, Mihai Gabureac,
1, 3 1 2 ´ ˇ 4 ˇ 4
Jessica L. Riesterer, Ivo Utke, Markus Hohl, Libor Sedlacek, Jaroslav Jiruse,
Vinzenz Friedli,1, 5 Mikhael Bechelany,1, 6 and Johann Michler1
1 EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures,
Feuerwerkerstrasse 39, 3602 Thun, Switzerland
2 TOFWERK AG, Uttigenstrasse 22, 3600 Thun, Switzerland
3 Idaho National Laboratory, Idaho Falls, ID 83415, USA
4 Tescan a. s., Libusina trıda 21, 623 00 Brno, Czech Republic
ˇ ˇ´
5 Specs Zurich GmbH, Technoparkstrasse 1, 8005 Zurich, Switzerland
¨ ¨
6 Institut Europeen des Membranes (UR CNRS 5635), Universite Montpellier 2, Place Eugene Bataillon, 34095 Montpellier, France
´ ´ `
Correspondence should be addressed to James A. Whitby, james.whitby@empa.ch
Received 15 April 2011; Accepted 11 August 2011
Academic Editor: Adam Georg Balogh
Copyrig
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