一种新结构的双向直线运动驻波型超声波电机.pdfVIP

第29 卷 第24 期 中 国 电 机 工 程 学 报 Vol.29 No.24 Aug. 25, 2009 2009 年8 月25 日 Proceedings of the CSEE ©2009 Chin.Soc.for Elec.Eng. 49 0258-8013 (2009) 24-0049-07 TM 356 TM 383 A 470 40 文章编号： 中图分类号： ； 文献标志码： 学科分类号： ⋅ 一种新结构的双向直线运动驻波型超声波电机 1 2 1 1 王波 ，戴吉岩，郭吉丰，魏燕定 (1.浙江大学电气工程学院，浙江省 杭州市 310027 ；2.香港理工大学应用物理学系，中国香港特别行政区) A New Structural Bi-directional Linear Moving Standing-wave Type Ultrasonic Motor 1 2 1 1 WANG Bo , DAI Ji-yan , GUO Ji-feng , WEI Yan-ding (1. College of Electrical Engineering, Zhejiang University, Hangzhou 310027, Zhejiang Province, China; 2. Department of Applied Physics and Material Research Center, the Hong Kong Polytechnic University, Hong Kong SAR, China) ABSTRACT: A new trial of bi-directional moving linear 大出力1.96 N，且达到了0.2 μm 以下的分辨率。 ultrasonic motor (LUSM) using a new structure has been 关键词：双向运动；驻波型；直线超声波电机；压电陶瓷 studied. This linear ultrasonic motor is composed of a single plate which was chiseled two grooves in both terminal parts to 0 ITRODUCTION form two weak links. By adjusting dimensions of weak links Piezoelectric ultrasonic motor may have merits and terminal plates, finite eleme