a novel mems electromagnetic actuator with large displacement：一种新型大位移电磁执行机构.pdfVIP

Sensors and Actuators A 221 (2015) 22–28 Contents lists available at ScienceDirect Sensors and Actuators A: Physical j o u r na l h o me p a ge : w w w. elsev /locate/sna A novel MEMS electromagnetic actuator with large displacement Xingdong Lv a,b,1, Weiwei Wei a,b,1, Xu Mao a,b , Yu Chen a,b , Jinling Yang a,b,∗ , Fuhua Yang a a Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, PR China b State Key Laboratory of Transducer Technology, Shanghai 200050, PR China a r t i c l e i n f o a b s t r a c t Article history: This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded Received 22 July 2014 beams, which is favorable for a large lateral stroke. A displacement of more than 55 m was achieved with Received in revised form 8 October 2014 a magnetic field of 0.14 T and the diving current of 8 mA. The actuator can generate a large displacement Accepted 23 October 2014 under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional Available online 31 October 2014 to the magnetic field and the driving current, which results in an easy control of the lateral displacement on the diving current. The simple structure and fabrication process ensure the actuator to have a high Keywords: fabrication yield and good stability. MEMS actuator