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a piezoelectric-driven rotary actuator by means of inchworm motion：压电驱动的旋转致动器的尺蠖运动方式
Sensors and Actuators A 194 (2013) 269–276
Contents lists available at SciVerse ScienceDirect
Sensors and Actuators A: Physical
j o u r n a l h o m e p ag e: w w w. elsev /locate/sna
A piezoelectric-driven rotary actuator by means of inchworm motion
Jianping Li a , Hongwei Zhao a,∗ , Han Qu a , Tao Cui a , Lu Fu a , Hu Huang a , Luquan Ren b , Zunqiang Fan a
a College of Mechanical Science Engineering, Jilin University, Changchun, 130025, China
b School for Biology and Agricultural Engineering, Jilin University, Changchun, 130025, China
a r t i c l e i n f o a b s t r a c t
Article history: This paper presents a piezoelectric-driven stepping rotary actuator based on the inchworm motion. With
Received 6 November 2012 the help of nine piezoelectric stacks and the flexure hinges, the designed actuator can realize large rotary
Received in revised form 10 February 2013
ranges and high rotary speed with high accuracy. Three kinds of working units that compose the actu-
Accepted 13 February 2013
ator are described and calculated: the clamping unit to hold the rotor, the adjusting unit to preload the
Available online 26 February 2013
piezoelectric stacks and the driving unit to produce the driving torque. To test the working performance,
a prototype actuator was fabricated, and the experimental results indicate that the minimum stepping
Keywords:
angle is 4.9
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