纳米多孔金薄膜和其微电极结构的制备--20141220.pdfVIP

纳米多孔金薄膜及其微电极结构的制备 曾志刚，周海军，龙啸，郭二娟 （上海大学理学院，上海200444 ） 摘要：本文结合光刻和溅射等MEMS 工艺和去合金法制备纳米多孔金膜基叉指型微电极阵 列。该方法首先利用光刻技术制备了叉指微电极结构，再通过磁控溅射方法获得了金银合金 薄膜，最后通过去合金方法进行浓硝酸自腐蚀处理，制备纳米多孔金薄膜。同时，本文系统 比较了腐蚀时间对纳米多孔金薄膜形貌和组分的影响。利用场发射扫描电子显微镜(FESEM) 和透射电子显微镜(TEM)表征了纳米多孔金薄膜微电极的形貌。结果表明合金化时间对样品 的纳米结构形成与演化有明显的影响。随着腐蚀时间增加，纳米多孔金薄膜孔隙度增加，金 韧带分布更加均匀，逐渐形成均匀的具有高表面积的开放式多孔结构。X 射线衍射(XRD) 对 样品的结构进行了表征与分析，结果表明纳米多孔金呈现明显的（111）晶面。 关键词：去合金法；纳米多孔金；微电极；MEMS ；微能源 Abstract: Nanoporous gold film based interdigitated microelectrode arrays can be formed by combining MEMS technology ( lithography、 sputtering and so on) and dealloying. Firstly interdigital microelectrode structure was fabricated by photolithography. Then, the gold and silver alloy thin films were prepared by magnetron sputtering method. Finally, nanoporous gold film was obtained by using concentrated nitric acid corrosion treatment. Meanwhile, we systematically investigated the effects of corrosion time of morphology and composition of nanoporous gold thin films. The morphology of the nanoporous gold thin film microelectrodes was characterized by field emission scanning electron microscope (FESEM) and transmission electron microscopy (TEM). The results showed that alloying time had significant effect on the formation and evolution of nanostructures of the samples. As the etching time increases, the nanoporous gold film porosity increases. The distribution of gold ligament is more uniform, gradually formed an open porous structure with high surface area. The structure of the samples were analyzed by X-ray diffraction (XRD). The results showed that nanoporous gold exhibited (111) plane. Kyeywords ： dealloying; nanoporous gold; microelectrode; MEMS; microenergy 在各类纳米多孔金属材料中，纳米多孔金，尤其是纳米多孔金薄膜材料备受关注。作为 高效电极材料或电极衬底材料，它们在催化、电催化和新能源技术的多个重要