一种具有抗静电反红外诱导滤光片的设计和制备.pdfVIP

第44卷第10期 红外与激光工程 2015年10月 Vol.44No.10 InfraredandLaserEngineering Oct.2015 一种具有抗静电反红外诱导滤光片的设计与制备 1 2 1 1 1 1 王济洲 ，李 宏 ，熊玉卿 ，董茂进 ，张 玲 ，李 晨 (1. 兰州空间技术物理研究所 真空技术与物理重点实验室，甘肃 兰州 730000； 2. 环境保护部核与辐射安全中心，北京 100082) 摘 要院对一种具有抗静电反红外且在可见及近红外高透过的滤光片进行了研究。采用诱导滤光片 的设计理论讨论了膜层厚度及薄膜常数对滤光片透射率及反射区的影响规律，采用离子束辅助沉积 方式和磁控溅射的方式对设计膜系进行了制备工艺研究，重点讨论了不同工艺条件下金属层的薄膜 常数的变化规律及其对滤光片性能的影响。最终设计的滤光片在750耀850nm谱段具有高达90%以上 的透过率、2500nm 以后谱段反射率高达90%，表面电阻小于300赘，该滤光片具有很好的抗静电及反 红外性能。 关键词院光学薄膜； 抗静电； 红外； 诱导滤光片 中图分类号院O439；TN27 文献标志码院A 文章编号院1007-2276(2015)10-3005-05 Design and preparation of one induced transmission filter with anlistatig and anti-infrared character 1 2 1 1 1 1 Wang Jizhou, Li Hong, Xiong Yuqing, Dong Maojin, Zhang Ling, Li Chen (1. Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Space Technology and Physics, Lanzhou 730000, China; 2. Nuclear and Radiation Safety Center, MEP, Beijing 100082, China) Abstracte: In order to design one special filter with wide鄄refection, ZnS and Ag film was chosen as the layers based on the induced transmission filter. The ZnS layers were deposited by Ion Beam Assisted Deposition (IBAD) and treated using ion source deposition, and the Ag layer was deposited by magnetron sputtering. The rate of Ag film with different working parameter was discussed in this paper. At last, the best working parameters were chosen and deposited the induced transmissio