多晶硅薄膜太阳电池的制备详解.docVIP

?多晶硅 薄膜太阳电池的制备 目 录 摘?要 ·························································11引言 ························································12多晶硅薄膜太阳电池 ·············································2 2.1电池工作原理?··············································2 2.2电池结构特点 ···············································3 2.3电池构成 ··················································4 3多晶硅薄膜太阳电池制备方法······································4 3.1半导体液相外延生长法（LPE法）································5 3.2区熔再结晶法（ZMR法）········································5 3.3等离子喷涂法（PSM）············