信息科学与电子工程专业英语Lecture技术分析.ppt

* Many semiconductor processing techniques use microwaves to generate plasma for such purposes as reactive ion etching and plasma-enhanced chemical vapor deposition (PECVD). 许多半导体处理工艺用微波来产生等离子体，用于反应离子蚀刻和等离子体增强化学气相沉积（PECVD）。 Unit 3-3 微波 ——用途 * Microwaves can be used to transmit power over long distances, and post-World War II research was done to examine possibilities. NASA worked in the 1970s and early 1980s to research the possibilities of using Solar Power Satellite (SPS) systems with large solar arrays that would beam power down to the Earth’s surface via microwaves.5 微波可用于长距离传输电能（微波输能），二