全球半导体晶体生长计算著名商业软件FEMAG_Czochralski Crystal Growth Simulation by FEMAGSoft.docxVIP

全球半导体晶体生长计算著名的商业软件FEMAG-CZ之直拉法Czochralski Crystal Growth Simulation by FEMAGSoftFEMAG-CZ is a global crystal growth simulation software taking into account the furnace geometry, the materials and the operating conditions in order to provide the user with all the information required for his process development and optimization.Global heat transfer, Thermo-elastic stresses, Defect prediction, Melt flow and Heater power. Features??Evolution of the solid/liquid interface shape (dynamic simulation) ??Thermal gradients in the liquid and solid phase ??Heat fluxes in the overall furnace ??Thermal-stresses in the crystal and hotzone components ??Continuous feeding ??Species (dopants and impurities) segregation and concentration ??Magnetic fields Supported Languages:English Supported TechnologiesOperating Systems:LinuxProgramming Languages:C/C++Product Type(s):SoftwareAdditional Product InformationFEMAG family products provide so-called global calculations , meaning that all the constituents of the furnace are taken into account, together with all heat transfer modes within and between them (conduction, convection and radiation). The modelling of conduction includes the possibility of temperature-dependent and anisotropic conductivity. The modelling of radiative heat exchanges assumes diffuse radiation and can take into account semi-transparent materials through wavelength-dependent radiative properties.The flow in the melt phase can be modelized by a laminar and/or turbulent model. It takes into account natural convection, due to temperature-dependent density and surface tension, and forced convection due to crystal, crucible and/or polycrystal - in case of the FZ process - rotations, possibly under the influence of a magnetic field (axial, cusp, rotating or transverse). Melt flow calculation also considers the effect of gas flow and of tangential forces due to induction (if any) on melt surface.The flow in the gas phase, as a result of an imposed flow rate at gas inlet and