Facility Gas Cabinet Cylinder Change OI.doc

Document Level: (For Engineering Quality Document/工程暨品质文件专用) ( Level 1 - Manual ( Level 2 – Procedure/SPEC/Report ( Level 3 - Operation Instruction Security Level: ( Security 1 - SMIC Confidential ( Security 2 - SMIC Restricted ( Security 3 - SMIC Internal Document Change History Rev. Effective Date Author Change Description 0 2006-10-18 SZ_Wang Initiate Title: Gas Cabinet cylinder change OI Purpose: To supply every kind of special gas from VMB or VMP to POU of tools continuously and safely. Scope: 3.1 Applied equipment: All tools which use special gas. 3.2 Subject Content : HPI (V1) High Pressure Isolation valve This high-pressure valve isolates the process gas pigtail from the panel, providing a High-pressure shutdown feature. HPV (V2) High Pressure Vent valve This low-pressure valve isolates the venturi vacuum generator from the process gas pigtail. PGI (V3) Purge Gas Isolation valve This high-pressure valve isolates the process gas pigtail from the purge gas pigtail. VVS (V4) Venturi Vacuum Supply valve This low-pressure valve opens to allow nitrogen to flow through the venturi so as to create the vacuum for purging the panel. LPV (V5) Low Pressure Vent valve This low-pressure valve serves the dual function of controlling the low-pressure venting of the system prior to purge. PGC (V6) Purge Gas Cycle valve This low-pressure valve controls the supply of ultra high purity (UHP) nitrogen during the purge procedure. This valve is the only valve cycling during the cycle purge sequence. PLI (V7) Process Line Isolation valve This low-pressure valve isolates the panel from the process line to protect the process tool. PGB (V8) Purge Gas Bleed valve This low-pressure valve controls the purge gas bleed flow for any maintenance function of the panel. It maintains a minimum flow during the cylinder change out to continuously purge the cylinder connection. ASO (V9) A